Signamization of resist images

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3051, Issue , 1997, Pages 620-628

  Lin, Burn J ^a  

^a Linnovation Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; IMAGE PROCESSING; MASKS; OPTIMIZATION; PERFORMANCE; PHASE SHIFT;

AERIAL IMAGES; CRITICAL DIMENSIONS; OPTICAL MICROLITHOGRAPHY; SIGNAMIZATION;

PHOTOLITHOGRAPHY;

EID: 0031339242     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.276041     Document Type: Conference Paper

References (8)