Microstrains and stresses analysis in electroless deposited thin Pd films

Industrial and Engineering Chemistry Research

Volumn 45, Issue 24, 2006, Pages 8145-8153

  Guazzone, Federico ^a   Payzant, E Andrew ^b   Speakman, Scott A ^c   Ma, Yi Hua ^a  

^a Worcester Polytechnic Institute   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

^c MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTRINSIC STRESSES; MICROSTRAINS;

ELECTROLESS PLATING; MICROSTRUCTURE; MORPHOLOGY; PLASTIC DEFORMATION; SCANNING ELECTRON MICROSCOPY; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

METALLIC FILMS;

ELECTROLESS PLATING; METALLIC FILMS; MICROSTRUCTURE; MORPHOLOGY; PLASTIC DEFORMATION; SCANNING ELECTRON MICROSCOPY; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

EID: 33845348919     PISSN: 08885885     EISSN: None     Source Type: Journal    
DOI: 10.1021/ie060756s     Document Type: Article

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