Thermal stability of amorphous molybdenum trioxide films prepared at different oxygen partial pressures by reactive DC magnetron sputtering

Vacuum

Volumn 81, Issue 5, 2007, Pages 636-643

  Mohamed, S H ^a,b   Venkataraj, S ^b  

^a Sohag University   (Egypt)

^b RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

Effect of annealing; MoO3; Optical properties; Sputtering; X ray diffraction; X ray reflectivity

Indexed keywords

ANNEALING; MAGNETRON SPUTTERING; MOLYBDENUM COMPOUNDS; PARTIAL PRESSURE; THERMODYNAMIC STABILITY; X RAY DIFFRACTION;

ANNEALING EFFECT; OPTICAL CHANGES; STRUCTURAL CHANGES; X RAY REFLECTIVITY;

AMORPHOUS FILMS;

EID: 33845290568     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2006.08.006     Document Type: Article

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