Using laser-cooled atoms as a focused ion beam source

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 6, 2006, Pages 2907-2910

  Hanssen, J L ^a   Dakin, E A ^a   McClelland, J J ^a   Jacka, M ^b  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b UNIVERSITY OF YORK   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM QUALITY; LASER COOLING TECHNIQUES; MAGNETO-OPTICAL TRAP;

ION BEAMS; LASER BEAMS; MAGNETOOPTICAL EFFECTS; OPTICAL PROPERTIES; PHOTOIONIZATION;

ATOMS;

EID: 33845247130     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2363406     Document Type: Article

References (22)

1. J. Melngailis, J. Vac. Sci. Technol. B 5, 469 (1987).
2. B. G. Freinkman, A. V. Eletskii, and S. I. Zaitsev, Microelectron. Eng. 73-74, 139 (2004).
3. J. Orloff and L. W. Swanson, J. Vac. Sci. Technol. 15, 845 (1978).
4. S. K. Guharay, E. Sokolovsky, and J. Orloff, J. Vac. Sci. Technol. B 17, 2779 (1999).
5. L. R. Harriott, Nucl. Instrum. Methods Phys. Res. B 55, 802 (1991).
6. J. Orloff, Rev. Sci. Instrum. 64, 1105 (1993).
7. B. J. Claessens, S. B. van der Geer, G. Taban, E. J. D. Vredenbregt, and O. J. Luiten, Phys. Rev. Lett. 95, 164801 (2005).
8. S. B. Hill and J. J. McClelland, Appl. Phys. Lett. 82, 3028 (2003).
9. E. Raab, M. Prentiss, A. Cable, S. Chu, and D. Pritchard, Phys. Rev. Lett. 59, 2631 (1987).
10. H. J. Metcalf and P. van der Straten, Laser Cooling and Trapping (Springer-Verlag, New York, 1999), and references within.
11. A. M. Steane, M. Chowdhury, and C. J. Foot, J. Opt. Soc. Am. B 9, 2142 (1992).
12. J. Dalibard and C. Cohen-Tannoudji, J. Opt. Soc. Am. B 6, 2023 (1989).
13. G. Mainfray and C. Maus, in Multiphoton Ionization of Atoms, edited by, S. L. Chin, and, P. Lambropoulos, (Academic, Orlando, FL, 1984), Chap..
14. J. Orloff, M. Utlaut, and L. Swanson, High Resolution Focused Ion Beams (Kluwer Academic, Dorctrecht/Plenum, New York, 2003).
15. G. D. Alton and P. M. Read, J. Appl. Phys. 66, 1018 (1989).
16. J. E. Barth and P. Kruit, Optik (Stuttgart) 101, 101 (1996).
17. J. D. Lawson, The Physics of Charged-Particle Beams (Oxford University Press, New York, 1988).
18. J. L. Hanssen, J. J. McClelland, E. A. Dakin, and M. Jacka, Phys. Rev. A (accepted).
19. R. Keller, in The Physics and Technology of Ion Sources, edited by, Ian G. Brown, (Wiley, New York, 1989), Chap..
20. O. Marago, D. Ciampini, F. Fuso, E. Arimondo, C. Gabbanini, and S. T. Manson, Phys. Rev. A 57, R4110 (1998).
21. R. L. Seliger, J. W. Ward, V. Wang, and R. L. Kubena, Appl. Phys. Lett. 34, 310 (1979).
22. John Moore, Christopher Davis, and Michael Coplan, Building Scientific Apparatus (Perseus Books, Reading, MA, 1989).