Wafer-scale fabrication of polymer distributed feedback lasers

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 6, 2006, Pages 3252-3257

  Christiansen, M B ^a   Scholer M ^a   Balslev, S ^a   Nielsen, R B ^a   Petersen, D H ^a   Kristensen, A ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

LASER RESONATORS; OPTICAL WAVEGUIDES; PHOTOLITHOGRAPHY; POLYMETHYL METHACRYLATES; SILICON WAFERS;

LASER DYES; OPTICAL POLYMER COMPONENTS; THERMAL NANOIMPRINT LITHOGRAPHY (TNIL); WAFER-SCALE FABRICATION;

DISTRIBUTED FEEDBACK LASERS;

EID: 33845245071     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2387154     Document Type: Article

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