Mechanical property evaluation of Au-coated nanospring fabricated by combination of focused-ion-beam chemical vapor deposition and sputter coating

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 6, 2006, Pages 3169-3172

  Nakamatsu, Ken Ichiro ^a,b,c   Kanda, Kazuhiro ^a   Haruyama, Yuichi ^a   Ichihashi, Toshinari ^d   Kaito, Takashi ^e   Matsui, Shinji ^a,b  

^a UNIVERSITY OF HYOGO   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c JAPAN SOCIETY FOR THE PROMOTION OF SCIENCE   (Japan)

^d NEC CORPORATION   (Japan)

^e SII NANOTECHNOLOGY INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COATINGS; ION BEAM ASSISTED DEPOSITION; NANOTECHNOLOGY; OPTICAL MICROSCOPY;

MECHANICAL MOTION; NANOSPRINGS; SPRING CONSTANTS; SPUTTER COATINGS;

NANOSTRUCTURED MATERIALS;

EID: 33845235454     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2397068     Document Type: Article

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