Formation of Ge nanocrystals and SiGe in PECVD grown SiNx:Ge thin films

Materials Science in Semiconductor Processing

Volumn 9, Issue 4-5 SPEC. ISS., 2006, Pages 848-852

  Dana, Aykutlu ^a   Tokay, Serkan ^b   Aydinli, Atilla ^a  

^a BILKENT UNIVERSITY   (Turkey)

^b KIRIKKALE UNIVERSITY   (Turkey)

Author keywords

Ge nanocrystals; Raman Scattering Spectroscopy

Indexed keywords

ANNEALING; GERMANIUM; PHONONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SCATTERING;

GE NANOCRYSTALS; PHONON MODES; POST-VACUUM ANNEALING;

NANOSTRUCTURED MATERIALS;

EID: 33845229978     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mssp.2006.08.073     Document Type: Article

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