Alloy effects on the Raman spectra of Si1-xGex and calibration protocols for alloy compositions based on polarization measurements

Semiconductor Science and Technology

Volumn 18, Issue 6, 2003, Pages 566-575

  Rath, S ^b   Hsieh, M L ^c   Etchegoin, P ^d   Stradling, R A ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

^b INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

^c UNITED MICROELECTRONICS CORPORATION   (Taiwan)

^d VICTORIA UNIVERSITY OF WELLINGTON   (New Zealand)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; CURVE FITTING; EPITAXIAL GROWTH; FREQUENCIES; HETEROJUNCTIONS; PHONONS; POLARIZATION; RAMAN SCATTERING;

CROSS POLARIZATION;

SILICON ALLOYS;

EID: 0038170539     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/18/6/330     Document Type: Article

References (17)

1. Renucci M A, Renucci J B and Cardona M 1971 Light Scattering in Solids ed M Balkanski (Paris: Flammarion) p 326
2. Brya W J 1973 Solid State Commun. 12 253
3. Lannin J S 1977 Phys. Rev. B 16 1510
4. Alonso M I and Winer K 1989 Phys. Rev. B 39 10056
5. Lockwood D J and Baribeau J-M 1992 Phys. Rev. B 45 8565
6. Franz M, Dombrowski K F, Rucker H, Dietrich B, Pressel K, Barz A, Kerat U, Dold P and Benz K W 1999 Phys. Rev. B 59 10614
7. Meyer F, Zafrany M, Eizenberg M, Beserman R, Schwebel C and Pellet C 1991 J. Appl. Phys. 70 4268
8. Lu F, Perry C H, Namavar F, Rowell N and Soref R A 1993 Appl. Phys. Lett. 63 1243
9. Dietrich B, Bugiel E, Klatt J, Lippert G, Morgenstern T, Osten H J and Zaumseil P 1993 J. Appl. Phys. 74 3177
10. Mooney P M, Dacol F H, Tsang J C and Chui J O 1993 Appl. Phys. Lett. 62 2069
11. Bhagavannarayana G, Dietrich B, Zaumseil P and Dombrowski K F 1999 Phys. Status Solidi a 172 425
12. Tsang J C, Mooney P M, Dacol F H and Chui J O 1994 J. Appl. Phys. 75 8098
13. Rath S, Grigorescu C, Hsieh M L, Voudouris E and Stradling R A 2000 Semicond. Sci. Technol. 15 L1
14. Lannin J S 1974 Proc. 5th Int. Conf. on the Physics of Amorphous and Liquid Semiconductors ed Stuke J and Brenig W (London: Taylor and Francis) p 1245
15. Grein C H and Cardona M 1992 Phys. Rev. B 45 8328
16. Humlicek J, Garriga M, Alonso M I and Cardona M 1989 J. Appl. Phys. 65 2827
17. Holtz M, Duncan M, Zollner and Liu R 2000 J. Appl. Phys. 88 2523