Integration of GaN thin films to SiO2-Si(100) substrates by laser lift-off and wafer fusion method

Superlattices and Microstructures

Volumn 40, Issue 4-6 SPEC. ISS., 2006, Pages 219-224

  Arokiaraj, J ^a   Soh, C B ^a   Wang, X C ^b   Tripathy, S ^a   Chua, S J ^a  

^a INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

^b SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

Author keywords

Blue LEDs; Laser lift off; Micro Raman; Nitride semiconductors; Wafer fusion

Indexed keywords

EXCIMER LASERS; GALLIUM NITRIDE; LIGHT EMITTING DIODES; SAPPHIRE; SILICA; VAN DER WAALS FORCES;

BRIGHTNESS; LASER LIFT-OFF; NITRIDE SEMICONDUCTORS; WAFER FUSION;

THIN FILMS;

EID: 33845203594     PISSN: 07496036     EISSN: 10963677     Source Type: Journal    
DOI: 10.1016/j.spmi.2006.07.032     Document Type: Article

References (8)

1. Letertre F., Bove P., Lahreche H., Faure B., Boussagol A., and Langer R. Solid State Technol. January (2006) 1-9
2. Wong W., Sands T., and Cheung N. Appl. Phys. Lett. 72 (1998) 599
3. Wong W.S., Sands T., Cheung N.W., Kneissl M., Bour D.P., Mei P., Romano L.T., and Johnson N.M. Appl. Phys. Lett. 75 (1999) 1360
4. Sangwoo S., Lee K.K., Sangbeom K., Huang S., Doolittle W.A., Jokerst N.M., Brown A.S., and Brooke M.A. IEEE Photon. Technol. Lett. 14 (2002) 185
5. Ogino T., and Aoki M. Japan. J. Appl. Phys. 19 (1980) 2395
6. Kozawa T., Kachi T., Kano H., Nagase H., Koide N., and Manabe K. J. Appl. Phys. 77 (1995) 4289
7. Perlin P., Carillon C.J., Itie J.P., Miguel A.S., Grzegory I., and Polian A. Phys. Rev. B 45 (1992) 83
8. Kisielowski C., Kruger J., Ruvimov S., Suski T., Ager III J.W., Jones E., Liliental-weber Z., Rubin M., Weber E.R., Bremser M.D., and Davis R.F. Phys. Rev. B 54 (1996) 17745