Fabrication and transistor demonstration on Si-based nanomembranes

2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings

Volumn 1, Issue , 2006, Pages 68-71

  Yuan, Hao Chih ^a   Roberts, Michelle M ^a   Savage, Donald E ^a   Lagally, Max G ^a   Ma, Zhenqiang ^a   Celler, George K ^b  

^a University of Wisconsin Madison   (United States)

^b Soitec USA   (United States)

Author keywords

Elastic strain relaxation; FET; Nanomembrane; SGOI; SOI

Indexed keywords

FIELD EFFECT TRANSISTORS; HETEROJUNCTIONS; SILICON ON INSULATOR TECHNOLOGY; SINGLE CRYSTALS; SUBSTRATES;

ELASTIC STRAIN RELAXATION; NANOMEMBRANES; SILICON-GERMANIUM-ON-INSULATOR (SGOI) SUBSTRATES;

NANOSTRUCTURED MATERIALS;

EID: 33845198938     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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