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Volumn 26, Issue 10, 2006, Pages 1483-1487

Design of objective lens with reflective spherical Fresnel zone plate

Author keywords

Objective lens; Optical design; Reflection; Spherical Fresnel zone plate

Indexed keywords

IMAGING TECHNIQUES; MIRRORS; MODULATION; OPTICAL TRANSFER FUNCTION; REFLECTION;

EID: 33751568464     PISSN: 02532239     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (8)

References (10)
  • 1
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    • Telocentric large field lenses using fresnel optics
    • Norbert Schuster. Thomas Schonheit. Telocentric large field lenses using fresnel optics[C]. Proc. SPIE, 2002, 4567: 190-198.
    • (2002) Proc. SPIE , vol.4567 , pp. 190-198
    • Schuster, N.1    Schonheit, T.2
  • 2
    • 0004147816 scopus 로고
    • London: Academic Press
    • D. Korsch. Reflective Optics[M]. London: Academic Press, 1991. 5-12
    • (1991) Reflective Optics , pp. 5-12
    • Korsch, D.1
  • 3
    • 0036658023 scopus 로고    scopus 로고
    • Study of the integration of EUVL experimental tool
    • in Chinese
    • Jin Chunshui, Ma Yueying, Pei Shu et al.. Study of the integration of EUVL experimental tool[J]. Acta Optica Sinica, 2002, 22(7): 852-857 (in Chinese).
    • (2002) Acta Optica Sinica , vol.22 , Issue.7 , pp. 852-857
    • Jin, C.1    Ma, Y.2    Pei, S.3
  • 4
    • 4644223505 scopus 로고    scopus 로고
    • Optical performance of extreme-ultraviolet lithography for 50 nm generation
    • in Chinese
    • Li Yanqiu. Optical performance of extreme-ultraviolet lithography for 50 nm generation[J]. Acta Optica Sinica, 2004, 24(7): 865-868 (in Chinese).
    • (2004) Acta Optica Sinica , vol.24 , Issue.7 , pp. 865-868
    • Li, Y.1
  • 5
    • 0942270075 scopus 로고    scopus 로고
    • Optical system of ultra-thin rear projection equipped with refractive reflective projection optics
    • S. Shiama, Optical system of ultra-thin rear projection equipped with refractive reflective projection optics[C]. SID Bostong, 2002, 46(2): 1250-1253.
    • (2002) SID Bostong , vol.46 , Issue.2 , pp. 1250-1253
    • Shiama, S.1
  • 6
    • 33751569805 scopus 로고    scopus 로고
    • Super-short focus front projectior with aspheric mirror projection optical system
    • Jun Ogawa, Kazuhiro Agata, Mikio Sakamoto et al.. Super-short focus front projectior with aspheric mirror projection optical system[C]. SID 04, 2004, 170-173.
    • (2004) SID 04 , pp. 170-173
    • Ogawa, J.1    Agata, K.2    Sakamoto, M.3
  • 7
    • 0001163111 scopus 로고    scopus 로고
    • Design of a plastic aspheric Fresnel lens with a spherical shape
    • Fernando Erismann. Design of a plastic aspheric Fresnel lens with a spherical shape[J]. Opt. Engng., 1997, 36(4): 988-991
    • (1997) Opt. Engng. , vol.36 , Issue.4 , pp. 988-991
    • Erismann, F.1
  • 8
    • 0348113323 scopus 로고    scopus 로고
    • Rigorous analysis and design of diffractive cylindrical lenses with high numerical and large geometrical apertures
    • Martin Schmitz, Olof Bryngdahl. Rigorous analysis and design of diffractive cylindrical lenses with high numerical and large geometrical apertures[J]. Opt. Commun., 1998, 153: 118-124.
    • (1998) Opt. Commun. , vol.153 , pp. 118-124
    • Schmitz, M.1    Bryngdahl, O.2
  • 9
    • 0029235905 scopus 로고
    • Full-colour diffraction-based optical system for light-valve projection displays
    • H. Roder, H. J. Ehrke, R. Gerhard-Multhaupt et al.. Full-colour diffraction-based optical system for light-valve projection displays[J], Display. 1995, 16(1). 27-33.
    • (1995) Display , vol.16 , Issue.1 , pp. 27-33
    • Roder, H.1    Ehrke, H.J.2    Gerhard-Multhaupt, R.3
  • 10
    • 0029255426 scopus 로고
    • Design and analysis of diffraction mirror optics for EUV projection lithography
    • Hiroshi Fukuda, Tsunco Terasawa. Design and analysis of diffraction mirror optics for EUV projection lithography[J], Microelectronic Engineering, 1995, 27: 239-242.
    • (1995) Microelectronic Engineering , vol.27 , pp. 239-242
    • Fukuda, H.1    Terasawa, T.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.