Processing of biomorphic Si3N4 ceramics by CVI-R technique with SiCl4/H2/N2 system

Journal of the European Ceramic Society

Volumn 27, Issue 4, 2007, Pages 2119-2125

  Ghanem, Hanadi ^a   Popovska, Nadejda ^a   Gerhard, Helmut ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

Chemical vapor infiltration (CVI); Fibers; Si3N4; SiC; Structural application

Indexed keywords

CHEMICAL REACTIONS; INFILTRATION; NITRIDING; NITROGEN; SILICON; SILICON NITRIDE; THERMOGRAVIMETRIC ANALYSIS;

BIOMORPHIC POROUS SILICON NITRIDE CERAMICS; CHEMICAL VAPOR INFILTRATION; GAS-SOLID CHEMICAL REACTION; REACTION BONDED SILICON NITRIDE;

CERAMIC MATERIALS;

CERAMIC MATERIALS; CHEMICAL REACTIONS; INFILTRATION; NITRIDING; NITROGEN; SILICON; SILICON NITRIDE; THERMOGRAVIMETRIC ANALYSIS;

EID: 33751541425     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2006.06.008     Document Type: Article

References (24)

1. Almeida Streitwieser D., Popovska N., Gerhard H., and Emig G. Application of the chemical vapor infiltration and reaction technique (CVI-R) for the preparation of high porous biomorphic SiC ceramics derived from paper. J. Eur. Ceram. Soc. 25 6 (2005) 817-828
2. Popovska N., Almeida Streitwieser D., Chen Xu, and Gerhard H. Paper derived biomorphic porous titanium carbide and titanium oxide ceramics produced by chemical vapor infiltration and reaction (CVI-R). J. Eur. Ceram. Soc. 25 6 (2005) 829-836
3. Almeida Streitwieser D., Popovska N., and Gerhard H. Optimization of the ceramization process for the production of three-dimensional biomorphic process SiC ceramics by chemical vapor infiltration (CVI). J. Eur. Ceram. Soc. 26 (2006) 2381-2387
4. Popper P. Application of silicon nitride. In: Hoffman M.T., Becker P.F., and Petzon G. (Eds). Key Engineering Materials vols. 89-91 (1994), Trans Tech Publications, Adermannsdorf, Switzerland 719-723
5. Ziegler G., Heinrich J., and Wötting G. Relationship between processing, microstructure and properties of dense and reaction-bonded silicon nitride. J. Mater. Sci. 22 (1987) 3041-3086
6. Thompson P.S., and Pratt P.L. The structure of Silicon nitride. In: Stwart G.H. (Ed). Science of Ceramics vol. 3 (1967), Academic Press, London, UK p.33
7. Ruddlesen S.N., and Popper P. On the crystal structures of the nitrides of silicon and germanium. Acta Cryst. 11 (1958) 465-468
8. Zerr A., Miehe G., Serghiou G., Schwarz M., Kroke F., and Riedel R. Synthesis of cubic silicon nitride. Nature 400 (1999) 324-340
9. 4 films. Thin Solid Films 450 (2004) 346-351
10. Yang J.F., Ohji T., and Niihara K. Influence of yttria-aluminua content on sintering behaviour and microstructure of silicon nitride ceramics. J. Am. Ceram. Soc. 83 8 (2000) 2094-2096
11. Park J.Y., Kim J.R., and Kim C.H. Effects of free silicon on the α-to-β-phase transformation in silicon nitride. J. Am. Ceram. Soc. 70 10 (1987) C-240-C-242
12. Almedia Streitwieser, D., Kinetic investigation of the chemical vapor infiltration and reaction (CVI-R) process for the production of SiC and TiC biomorphic ceramics from paper preforms, Dissertation. University of Erlangen-Nuremberg, Erlangen, 2004.
13. Moulson A.J. Review: reaction-bonded silicon nitride: its formation and properties. J. Mater. Sci. 14 (1979) 1017-1051
14. 4. J. Am. Ceram. Soc. 58 (1975) 354-355
15. 2 on the nitridation of silicon. J. Mater. Sci. Lett. 1 (1982) 337-340
16. Mukerji J., and Biswas S.K. Effect of iron, titanium, and hafnium on second-stage nitriding of silicon. J. Am. Ceram. Soc. 64 (1981) 549
17. Boyer S.M., and Moulson A.J. Optimization of time-temperature schedule for nitridation of silicon compact on the basis of silicon and nitrogen reaction kinetics. J. Mater. Sci. 13 (1978) 1637
18. Jones B.F., and Lindley M.W. Reaction sintered silicon nitride. J. Mater. Sci. Lett. 11 (1976) 1969
19. 4 by X-ray diffraction analysis. Am. Ceram. Soc. Bull. 56 9 (1977) 777-780
20. Gazzara C.P., and Messier D.R. Quantitative Determination of Phase Content of Silicon Nitride by X-Ray Diffraction Analysis (1975), AMMRC TR-75-4
21. Miyagawa, N., Kondoh, S. and Shinohara, N., Synthesis and Characteristics of Porous Silicon Nitride Through the Direct Nitridation of Silicon Compacts, vol. 52. ASAHI GLASS Co. Ltd.: Research & Development/R&D library, paper 4.
22. Kaiser W., and Thurmond C.D. Nitrogen in silicon. J. Appl. Phys. 30 (1959) 427-431
23. Niihara K. New design concept of structural ceramics: ceramic nanocomposites. J. Ceram. Soc. Jpn. 99 (1991) 974-982
24. 4/SiC nanocomposite from amorphous Si-C-N powder precursor. In: Kimura S., and Niihara K. (Eds). Proceedings of the 1st international Symposium on the Science of Engineering Ceramics (1991), The Ceramic Society of Japan, Tokyo, Japan 443