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Volumn 807, Issue , 2006, Pages 299-308

Feasibility study of two-step LIGA-fabricated circuits applicable to millimeter/submillimeter wave sources

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Indexed keywords


EID: 33751348849     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.2158792     Document Type: Conference Paper
Times cited : (7)

References (19)
  • 9
    • 33751326082 scopus 로고    scopus 로고
    • Device and Process Technologies for MEMS and Microelectronics II, edited by J.-C. Chiao SPIE 315
    • G. J. O'Brien, D. J. Monk, and K. Najafi, in Device and Process Technologies for MEMS and Microelectronics II, edited by J.-C. Chiao, Proc. SPIE, 315, vol. 4592, 2001.
    • (2001) Proc. SPIE , vol.4592
    • O'Brien, G.J.1    Monk, D.J.2    Najafi, K.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.