Structure determination of clusters formed in ultra-low energy high- dose implanted silicon

Solid State Phenomena

Volumn 108-109, Issue , 2005, Pages 303-308

  Cherkashin, N ^a   Hytch, M ^a   Cristiano, F ^a   Claverie, A ^b  

^a CEMES CNRS   (France)

^b LAAS CNRS   (France)

Author keywords

BICs; Burger s vector; Contrast analysis; HRTEM; Platelets; TEM

Indexed keywords

DEFECTS; PLATELETS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON; TRANSMISSION ELECTRON MICROSCOPY;

BICS; CONTRAST ANALYSIS; DISLOCATION LOOP; DISPLACEMENT FIELD; GEOMETRIC PHASE ANALYSIS; HRTEM; STRUCTURAL CHARACTERIZATION; STRUCTURE DETERMINATION;

HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY;

EID: 33751329967     PISSN: 10120394     EISSN: 16629779     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/SSP.108-109.303     Document Type: Conference Paper

References (7)

1. A. Agarwal, H. J. Gossman, D. J. Eaglesham, L. Pelaz, S. B. Herner, D. C. Jacobson, T. E. Haynes, and R. Simonton, Mater. Sci. Semic. Process. 1, 17 (1998).
2. T. L. Aselage, J. Mater. Res. 13, 1789 (1998).
3. P. Pichler, Mater. Res. Soc. Symp. Proc. 717, 103 (2002).
4. F. Cristiano, X. Hebras, N. Cherkashin, A. Claverie, W. Lerch, S. Paul, Appl. Phys. Lett. 83 (26), pp. 5407-5409, 2003.
5. M. Hytch, J.- L. Putaux, J.- M. Pénisson, Nature 423, 270 (2003).
6. B. de Mauduit, L. Laânab, C. Bergaud, M.M. Faye, A. Martinez and A. Claverie, Nucl. Instr. and Meth. in Phys. Res. B 84, 190 (1994).
7. J. W. Edington "Monographs in Practical Electron Microscopy in Materials Science" section 3.5 (Philips Technical Library, Macmillan 1975 - Reprinted by Techbooks in 1976) (1975).