Gas sensor application of piezoelectric cantilever nanobalance; electrical signal read-out

Ferroelectrics

Volumn 328, Issue , 2005, Pages 59-65

  Shin, Sanghun ^a   Paik, Jun Kyu ^a   Lee, Nae Eung ^a   Park, Joon Shik ^b   Park, Hyo Derk ^b   Lee, Jaichan ^a  

^a Sungkyunkwan University   (South Korea)

^b Korea Electronic Technology Institute (KETI)   (South Korea)

Author keywords

Gas sensor; MEMS; Microcantilever; PZT; Resonant frequency

Indexed keywords

CANTILEVER BEAMS; CHEMICAL SENSORS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; POLYMETHYL METHACRYLATES; VOLATILE ORGANIC COMPOUNDS;

ELECTRICAL SIGNAL OUTPUT; ENVIRONMENTAL GAS MOLECULES; GAS SENSITIVITY; MICROCANTILEVERS;

ELECTRIC SIGNAL SYSTEMS;

EID: 33751292647     PISSN: 00150193     EISSN: 15635112     Source Type: Conference Proceeding    
DOI: 10.1080/00150190500311060     Document Type: Article

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