Electrical characterization of PMNT thin films

Integrated Ferroelectrics

Volumn 55, Issue , 2003, Pages 853-862

  Fribourg Blanc, E ^a   Defay E ^b   Cattan, E ^a   Remiens, D ^a   Tartavel, G ^b   Aid M ^b  

^a UNIVERSITÉ DE VALENCIENNES   (France)

^b CEA LETI   (France)

Author keywords

High K; Low temperature; PMN; Sputtering; Thin film

Indexed keywords

CAPACITORS; ELECTRIC PROPERTIES; LEAD COMPOUNDS; LOW TEMPERATURE EFFECTS; MAGNETRON SPUTTERING; MICROSTRUCTURE;

HIGH K; INTEGRATED CAPACITORS; LEAD MAGNESIUM NIOBATE - LEAD TITANATE (PMNT); PLATINIZED SILICON;

THIN FILMS;

EID: 33751292390     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580390259308     Document Type: Article

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