Heating of a uniform wafer disk

International Journal of Mechanical Sciences

Volumn 49, Issue 2, 2007, Pages 230-238

  Seffen, K A ^a   McMahon, R A ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Buckling; Finite elements; Gaussian curvature; Heating; Semi conductor wafer

Indexed keywords

BUCKLING; DEFORMATION; FINITE ELEMENT METHOD; HEAT TREATMENT; SILICON WAFERS; SOLUTIONS;

GAUSSIAN CURVATURE; SEMI CONDUCTOR WAFER; STRAIN ENERGY;

SEMICONDUCTOR MATERIALS;

EID: 33751245124     PISSN: 00207403     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijmecsci.2006.08.003     Document Type: Article

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