Photo-resist ashing by atmospheric pressure glow discharge

Current Applied Physics

Volumn 7, Issue 2, 2007, Pages 211-214

  Han, Kun H ^a   Kang, Jung G ^a   Uhm, Han S ^a   Kang, Bang K ^a  

^a Ajou University   (South Korea)

Author keywords

Atmospheric pressure glow plasma; PR ashing

Indexed keywords

ATMOSPHERIC PRESSURE; OXYGEN; PLASMAS; SUBSTRATES;

ATMOSPHERIC PRESSURE GLOW PLASMA; PR ASHING; REACTIVE AGENTS;

GLOW DISCHARGES;

EID: 33751232347     PISSN: 15671739     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cap.2006.04.002     Document Type: Article

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