Thin film capacitor cut from single crystals using focused ion beam milling

Integrated Ferroelectrics

Volumn 61, Issue , 2004, Pages 239-248

  Saad, M M ^a   Bowman, R M ^a   Gregg, J M ^a  

^a QUEEN'S UNIVERSITY BELFAST   (United Kingdom)

Author keywords

BTO; FIB; Grain size; Single crystal; Size effects; STO

Indexed keywords

ANNEALING; CAPACITORS; DEPOSITION; ION BEAMS; PERMITTIVITY; SINGLE CRYSTALS; TRANSMISSION ELECTRON MICROSCOPY;

BTO; FIB; SIZE EFFECTS; STO;

THIN FILM DEVICES;

EID: 33751165742     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580490460187     Document Type: Article

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