Modeling and simulating the stick-slip motion of the μwalker, a MEMS-based device for μsPAM

Microsystem Technologies

Volumn 13, Issue 2, 2007, Pages 181-188

  Patrascu, M ^a   Stramigioli, S ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC MOTORS; MICROACTUATORS; PRODUCT DEVELOPMENT;

ELECTROSTATIC STEPPERS; MICRO DEVICES; SCANNING PROBE MICROACTUATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 33751105860     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0161-8     Document Type: Conference Paper

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