Optical substrate thickness measurement system using hybrid fiber-freespace optics and selective wavelength interferometry

Optics Communications

Volumn 269, Issue 1, 2007, Pages 24-29

  Riza, Nabeel A ^a,b   Sheikh, Mumtaz ^b   Perez, Frank ^a  

^a Nuonics Inc   (United States)

^b UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFEROMETRY; LENSES; MICROPROCESSOR CHIPS; OPTICAL FIBERS; OPTICAL VARIABLES MEASUREMENT; SILICON CARBIDE; THICKNESS MEASUREMENT;

ETALON EFFECTS; OPTICAL CHIPS; OPTICAL POWER; WAVELENGTHS;

OPTICAL MATERIALS;

EID: 33751068247     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optcom.2006.07.069     Document Type: Article

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