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Volumn 515, Issue 4, 2006, Pages 2055-2058
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Preparation and microstructure properties of Al-doped TiO2-SiO2 gel-glass film
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Author keywords
AFM; Al doped; TiO2 SiO2 gel glass film; XPS
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Indexed keywords
ALUMINUM;
ATOMIC FORCE MICROSCOPY;
DOPING (ADDITIVES);
GLASS;
HYDROLYSIS;
MICROSTRUCTURE;
MULTILAYERS;
SILICON WAFERS;
SPIN COATING;
X RAY PHOTOELECTRON SPECTROSCOPY;
ELEMENTAL COMPOSITION;
GLASS FILMS;
MULTI-LAYER SPIN COATING;
TITANIUM COMPOUNDS;
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EID: 33750821437
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2006.05.018 Document Type: Article |
Times cited : (36)
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References (15)
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