Research on the Out-of-plane thermal conductivity of nanometer silicon film

Thin Solid Films

Volumn 515, Issue 4, 2006, Pages 2203-2206

  Zenghui, Wang ^a   Zhixin, Li ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Boltzmann transport equation; Molecular dynamics; Nanometer silicon film; Out of plane thermal conductivity

Indexed keywords

MOLECULAR DYNAMICS; NONLINEAR EQUATIONS; PHONONS; THERMAL CONDUCTIVITY; THICKNESS MEASUREMENT;

BOLTZMANN TRANSPORT EQUATION; NANOMETER SILICON FILM; OUT-OF-PLANE THERMAL CONDUCTIVITY;

THIN FILMS;

EID: 33750812512     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.03.018     Document Type: Article

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