-
1
-
-
0033346567
-
MEMS reliability, process monitoring and quality assurance
-
Last H.R., Dudley B., and Wood R. MEMS reliability, process monitoring and quality assurance. Proceedings of the SPIE conference on MEMS reliability for critical and space applications, vol. 3880 (1999) 140-147
-
(1999)
Proceedings of the SPIE conference on MEMS reliability for critical and space applications, vol. 3880
, pp. 140-147
-
-
Last, H.R.1
Dudley, B.2
Wood, R.3
-
3
-
-
33750811270
-
-
Kennedy JA. Compliant, in-plane ratchet and pawl micromechanisms for safety applications. MS Thesis. Brigham Young University; 2003.
-
-
-
-
4
-
-
33750821827
-
-
Cannon JR. Compliant mechanisms to perform bearing and spring functions in high precision applications. MS Thesis. Brigham Young University; 2004.
-
-
-
-
5
-
-
33750808341
-
Reliability of a MEMS torsional ratcheting actuator
-
Tanner D.M., Walraven J.A., Barnes S.M., Smith N.F., Bitsie F., and Swanson S.E. Reliability of a MEMS torsional ratcheting actuator. Proceedings of the IEEE 39th annual international reliability physics symposium (2001) 81-90
-
(2001)
Proceedings of the IEEE 39th annual international reliability physics symposium
, pp. 81-90
-
-
Tanner, D.M.1
Walraven, J.A.2
Barnes, S.M.3
Smith, N.F.4
Bitsie, F.5
Swanson, S.E.6
-
6
-
-
0033352363
-
Failure analysis of wore surface micromachined microengines
-
Walraven J.A., Headley T.J., Campbell A.N., and Tanner D.M. Failure analysis of wore surface micromachined microengines. Proceedings of the SPIE conference on MEMS reliability for critical and space applications, vol. 3880 (1999) 30-39
-
(1999)
Proceedings of the SPIE conference on MEMS reliability for critical and space applications, vol. 3880
, pp. 30-39
-
-
Walraven, J.A.1
Headley, T.J.2
Campbell, A.N.3
Tanner, D.M.4
-
7
-
-
33750836017
-
Packaging for microengineered devices
-
2/1-2/8
-
Beardmore G. Packaging for microengineered devices. Inst Electr Eng (1997) 2/1-2/8
-
(1997)
Inst Electr Eng
-
-
Beardmore, G.1
-
8
-
-
85008002496
-
Nano-to-milllimeter scale integrated systems
-
Last H.R., Deeds M., Garvick D., Kavetsky R., Sandborn P.A., Magrab E.B., et al. Nano-to-milllimeter scale integrated systems. IEEE Trans Compon Pack Technol 22 2 (1999) 338-343
-
(1999)
IEEE Trans Compon Pack Technol
, vol.22
, Issue.2
, pp. 338-343
-
-
Last, H.R.1
Deeds, M.2
Garvick, D.3
Kavetsky, R.4
Sandborn, P.A.5
Magrab, E.B.6
-
12
-
-
0033709002
-
Synthesizing high-performance compliant stroke amplification systems for MEMS
-
Kota S., Hetrick J., Li Z., Rodgers S., and Krygowsky T. Synthesizing high-performance compliant stroke amplification systems for MEMS. Proceedings of the IEEE 13th annual international conference on microelectromechanical systems (2000) 164-169
-
(2000)
Proceedings of the IEEE 13th annual international conference on microelectromechanical systems
, pp. 164-169
-
-
Kota, S.1
Hetrick, J.2
Li, Z.3
Rodgers, S.4
Krygowsky, T.5
-
14
-
-
0023984299
-
Numerical analysis of a generalized plane elastica with non-linear material behavior
-
Coulter B.A., and Miller R.E. Numerical analysis of a generalized plane elastica with non-linear material behavior. Int J Numer Meth Eng 26 (1988) 617-630
-
(1988)
Int J Numer Meth Eng
, vol.26
, pp. 617-630
-
-
Coulter, B.A.1
Miller, R.E.2
-
15
-
-
0029406305
-
Designing compliant mechanisms
-
Ananthasuresh G.K., and Kota S. Designing compliant mechanisms. Mech Eng 117 11 (1995) 93-96
-
(1995)
Mech Eng
, vol.117
, Issue.11
, pp. 93-96
-
-
Ananthasuresh, G.K.1
Kota, S.2
-
16
-
-
78249283521
-
-
Wittwer JW, Howell LL. Design of a functionally binary pinned-pinned segment for use as a tansion-compression spring in compliant micro-mechanisms, IMECE 2002-33982; 2002.
-
-
-
-
17
-
-
33750841654
-
-
Norton RL. Design of Machinery. New York, NY: McGraw-Hill; 2004. p. 37.
-
-
-
-
19
-
-
0036905711
-
Mechanics of microcantilever beams subject to combined electrostatic and adhesive forces
-
Knapp J.A., and de Boer M.P. Mechanics of microcantilever beams subject to combined electrostatic and adhesive forces. IEEE J Microelectromech Syst 11 6 (2002) 754-764
-
(2002)
IEEE J Microelectromech Syst
, vol.11
, Issue.6
, pp. 754-764
-
-
Knapp, J.A.1
de Boer, M.P.2
|