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Volumn 515, Issue 4, 2006, Pages 1354-1357

Noncontact characterization of sheet resistance of indium-tin-oxide thin films by using a near-field microwave microprobe

Author keywords

Indium tin oxide; Near field scanning microwave microprobe; Sheet resistance; Surface roughness

Indexed keywords

INDIUM ALLOYS; MICROSTRUCTURE; MORPHOLOGY; RESONATORS; SURFACE ROUGHNESS;

DIFFRACTION PEAK; INDIUM-TIN-OXIDE (ITO) THIN FILMS; NEAR-FIELD SCANNING MICROWAVE MICROPROBE; SHEET RESISTANCE;

THIN FILMS;

EID: 33750804190 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2006.03.047 Document Type: Article

Times cited : (28)

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