Strain gradient plasticity length scale parameters for LIGA Ni MEMs thin films

Materials Science and Engineering: A

Volumn 441, Issue 1-2, 2006, Pages 299-307

  Lou, J ^a   Shrotriya, P ^a   Allameh, S ^a   Buchheit, T ^b   Soboyejo, W O ^a  

^a Princeton University   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Length scale parameters; LIGA Ni MEMS; Micro bend techniques; Nano indentation; Strain gradient plasticity; Thin films

Indexed keywords

INDENTATION; MICROELECTROMECHANICAL DEVICES; PLASTIC DEFORMATION; PLASTICITY; TENSILE PROPERTIES; THIN FILMS;

LENGTH SCALE PARAMETERS; MICRO-BEND TECHNIQUES; NANO-INDENTATION; STRAIN GRADIENT PLASTICITY;

STRAIN;

INDENTATION; MICROELECTROMECHANICAL DEVICES; PLASTIC DEFORMATION; PLASTICITY; STRAIN; TENSILE PROPERTIES; THIN FILMS;

EID: 33750633561     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msea.2006.08.048     Document Type: Article

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