Single-crystal silicon gyroscope with decoupled drive and sense

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3876, Issue , 1999, Pages 74-83

  Adams, Scott ^a   Groves, James ^a   Shaw, Kevin ^a   Davis, Timothy ^a   Cardarelli, Donato ^a   Carroll, Raymond ^a   Walsh, Joseph ^a   Fontanella, Mark ^a  

^a Kionix Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ELECTRODES; MICROMACHINING; OSCILLATORS (ELECTRONIC); PLASMA APPLICATIONS; SENSORS; SILICON; SILICON ON INSULATOR TECHNOLOGY; SILICONES; SINGLE CRYSTALS;

DECOUPLED DRIVE; PLASMA MICROMACHINING PROCESS; SENSE OSCILLATORS;

GYROSCOPES;

EID: 0033319571     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)