A Micro Conveyance Actuator based on Superconducting Magnetic Levitation

IEEJ Transactions on Sensors and Micromachines

Volumn 119, Issue 42591, 1999, Pages 417-423

  Tetsuhiko, Iizuka ^a   Hiroyuki, Fujita ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33750324405     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.119.417     Document Type: Article

References (10)

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2. Yoshihiko Maeda, Kazuyuki Aihara and Hiroyuki Fujita: “A Vacuum compatible X-Y Microactuator using the Levitational Effect of a Superconductor”, Proc. IMACS/SICE international Symposium on Robotics, Mechatronics and Manufacturing System Kobe, 623～628 (1992).
3. Yoshiyuki Tomita, et al.: “Direct Frictional Driven Surface Acoustic Wave Motor”, J. of Dynamic Systems, Measurement and Control, 117, 3, 311～319 (1995-9).
4. Masakazu Takahashi, Minoru Kurosawa and Toshio Higuchi: “Direct Frictional Driven Surface Acoustic Wave Motor”, IEEE, The 8th International Conference on Solid-State Sensors and Actuators (Transducers 95), Stockholm, Sweden, 1 of 2, 401～404 (1995-6).
5. Haruo Nakazawa, Yasumasa Watanabe, Osamu Morita, Masaharu Edo and Eiichi Yonezawa: “The Two-dimensional Micro Conveyer”, 1997 International Conference on Solid-State Sensors and Actuators (Transducers 97), IEEE, Chicago, USA, 1, 33～36 (1997-6).
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7. Satoshi Konishi and Hiroyuki Fujita: “Two-dimensional conveyance system using cooperative motions of many microactuators”, Proc. of 1996 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS, Osaka, Japan, 2 of 3, 988～992 (1996).
8. Tetsuhiko Iizuka, Yoshihiko Maeda, Kazuyuki Aihara and Hiroyuki Fujita: “A Micro X-Y-θ Conveyor by Superconducting Magnetic Levitation”, IEEE Symposium on Emerging Technologies and Factory Automation, ETFA, Tokyo, Japan, 62～67 (1994).
9. Tetsuhiko Iizuka and Hiroyuki Fujita: “Precise Positioning of a Micro Conveyor based on Superconducting Magnetic Levitation”, IEEE, 1997 International Symposium on Micromechatronics and human science (MHS97) Nagoya, Japan, 131～135 (1997-10).
10. Desheng Li, Kyoseok Chun, Tetsuhiko Iizuka and Hiroyuki Fujita: “Two Dimensional Micro Magnetic Sensor Array”, Technical Digest of the 16th Sensor Symposium, IEEJ, Kawasaki, Japan, 217～222 (1998-6).