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Volumn 2, Issue , 1996, Pages 988-992
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Two-dimensional conveyance system using cooperative motions of many microactuators
a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ARRAYS;
AUTOMATION;
DECENTRALIZED CONTROL;
INTEGRATED CIRCUITS;
POSITION CONTROL;
SENSORS;
SERVOMECHANISMS;
SYSTEMS ANALYSIS;
CONVEYANCE SYSTEM;
DISTRIBUTED MICRO MOTION SYSTEMS;
MICRO AXEL;
MICROACTUATORS;
TWO DIMENSIONAL;
ACTUATORS;
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EID: 0030415236
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (7)
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References (8)
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