-
1
-
-
0032306958
-
-
A. Schütze, J. Y. Jeong, S. E. Babayan, J. Park, G. S. Selwyn, and R. F. Hicks, IEEE Trans. Plasma Sci. 26, 1685 (1998).
-
(1998)
IEEE Trans. Plasma Sci.
, vol.26
, pp. 1685
-
-
Schütze, A.1
Jeong, J.Y.2
Babayan, S.E.3
Park, J.4
Selwyn, G.S.5
Hicks, R.F.6
-
2
-
-
0001083964
-
-
J. Park, I. Henins, H. W. Herrmann, and G. S. Selwyn, J. Appl. Phys. 89, 15 (2001).
-
(2001)
J. Appl. Phys.
, vol.89
, pp. 15
-
-
Park, J.1
Henins, I.2
Herrmann, H.W.3
Selwyn, G.S.4
-
3
-
-
0001083968
-
-
J. Park, I. Henins, H. W. Herrmann, G. S. Selwyn, and R. F. Hicks, J. Appl. Phys. 89, 20 (2001).
-
(2001)
J. Appl. Phys.
, vol.89
, pp. 20
-
-
Park, J.1
Henins, I.2
Herrmann, H.W.3
Selwyn, G.S.4
Hicks, R.F.5
-
4
-
-
0000904120
-
-
J. Park, I. Henins, H. W. Herrmann, G. S. Selwyn, J. Y. Jeong, R. F. Hicks, D. Shim, and C. S. Chang, Appl. Phys. Lett. 76, 288 (2000).
-
(2000)
Appl. Phys. Lett.
, vol.76
, pp. 288
-
-
Park, J.1
Henins, I.2
Herrmann, H.W.3
Selwyn, G.S.4
Jeong, J.Y.5
Hicks, R.F.6
Shim, D.7
Chang, C.S.8
-
5
-
-
22544450235
-
-
J. Laimer, S. Haslinger, W. Meissl, J. Hell, and H. Störi, Vacuum 79, 209 (2005).
-
(2005)
Vacuum
, vol.79
, pp. 209
-
-
Laimer, J.1
Haslinger, S.2
Meissl, W.3
Hell, J.4
Störi, H.5
-
7
-
-
33750166041
-
-
edited by J.Mostaghimi, T. W.Coyle, V. A.Pershin, and H. R.Salimi Jazi (University of Toronto Press, Toronto
-
J. Laimer, S. Haslinger, W. Meissl, J. Hell, and H. Störi, in Proceedings of the 17th International Symposium on Plasma Chemistry, edited by, J. Mostaghimi, T. W. Coyle, V. A. Pershin, and, H. R. Salimi Jazi, (University of Toronto Press, Toronto, 2005), pp. 238-239.
-
(2005)
Proceedings of the 17th International Symposium on Plasma Chemistry
, pp. 238-239
-
-
Laimer, J.1
Haslinger, S.2
Meissl, W.3
Hell, J.4
Störi, H.5
-
8
-
-
18744376333
-
-
X. Yang, M. Moravej, G. R. Nowling, S. E. Babayan, J. Panelon, J. P. Chang, and R. F. Hicks, Plasma Sources Sci. Technol. 14, 314 (2005).
-
(2005)
Plasma Sources Sci. Technol.
, vol.14
, pp. 314
-
-
Yang, X.1
Moravej, M.2
Nowling, G.R.3
Babayan, S.E.4
Panelon, J.5
Chang, J.P.6
Hicks, R.F.7
-
13
-
-
0032022902
-
-
F. Massines, A. Rabehi, P. Decomps, R. B. Gadri, P. Śgur, and C. Mayoux, J. Appl. Phys. 83, 2950 (1998).
-
(1998)
J. Appl. Phys.
, vol.83
, pp. 2950
-
-
Massines, F.1
Rabehi, A.2
Decomps, P.3
Gadri, R.B.4
Śgur, P.5
Mayoux, C.6
-
14
-
-
0034247479
-
-
N. Gherardi, G. Gouda, E. Gat, A. Ricard, and F. Massines, Plasma Sources Sci. Technol. 9, 340 (2000).
-
(2000)
Plasma Sources Sci. Technol.
, vol.9
, pp. 340
-
-
Gherardi, N.1
Gouda, G.2
Gat, E.3
Ricard, A.4
Massines, F.5
-
15
-
-
0004036361
-
-
CRC, Boca Raton, FL
-
Y. P. Raizer, M. N. Shneider, and N. A. Yatsenko, Radio-Frequency Capacitive Discharges (CRC, Boca Raton, FL, 1995), pp. 36-43.
-
(1995)
Radio-Frequency Capacitive Discharges
, pp. 36-43
-
-
Raizer, Y.P.1
Shneider, M.N.2
Yatsenko, N.A.3
-
16
-
-
33645670570
-
-
S. Y. Moon, J. K. Rhee, D. B. Kim, and W. Choe, Phys. Plasmas 13, 033502 (2006).
-
(2006)
Phys. Plasmas
, vol.13
, pp. 033502
-
-
Moon, S.Y.1
Rhee, J.K.2
Kim, D.B.3
Choe, W.4
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