Optimized thermo-reflectance system for measuring the thermal properties of thin-films and their interfaces

Annual IEEE Semiconductor Thermal Measurement and Management Symposium

Volumn 2006, Issue , 2006, Pages 87-94

  Burzo, Mihai G ^a   Komarov, Pavel L ^a   Raad, Peter E ^a  

^a Southern Methodist University   (United States)

Author keywords

Materials Characterization; Thermal conductivity; Thermoreflectance; Thin films

Indexed keywords

INTERFACES (MATERIALS); OPTIMIZATION; REFLECTION; THERMAL CONDUCTIVITY; THERMAL VARIABLES MEASUREMENT; THERMODYNAMIC PROPERTIES;

INTERFACE RESISTANCE; MATERIALS CHARACTERIZATION; THERMOREFLECTANCE; TRANSIENT THERMO REFLECTANCE (TTR);

THIN FILMS;

EID: 33750138504     PISSN: 10652221     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

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