Electrostatically-controlled, self-pneumatically-actuated microvalve with high pressure tolerance and low pressure loss

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 746-749

  Satoh, D ^a   Tanaka, S ^a   Esashi, M ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; HIGH PRESSURE EFFECTS; MICROELECTROMECHANICAL DEVICES; PNEUMATIC CONTROL;

DRIVING VOLTAGE; ELECTROSTATIC SUB-VALVES; HIGH PRESSURE TOLERANCE; PNEUMATIC ACTUATION;

VALVES (MECHANICAL);

EID: 33750125249     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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