Simultaneous and independent measurement of stress and temperature using a single field effect transistor based sensor

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 150-153

  Doelle, M ^a   Held, J ^a   Ruther, P ^a   Paul, O ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC RESISTANCE; HALL EFFECT; MICROSENSORS; SHEAR STRESS; THERMAL EFFECTS; THRESHOLD VOLTAGE;

MECHANICAL STRESS; PIEZORESISTIVE EFFECTS; SINGLE FIELD EFFECT TRANSISTORS; TEMPERATURE COEFFICIENT;

FIELD EFFECT TRANSISTORS;

EID: 33750106935     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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