A 32*32 parylene-pyrolyzed carbon bolometer imager

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 106-109

  Liger, Matthieu ^a   Tal, Yu Chong ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGING SYSTEMS; INFRARED DETECTORS; MICROMACHINING; PYROLYSIS; THIN FILMS; TUNERS;

CARBON BOLOMETER IMAGERS; CARBON UNCOOLED BOLOMETERS; LARGE AREA ARRAYS; NOISE EQUIVALENT TEMPERATURE DIFFERENCE (NETD);

BOLOMETERS;

EID: 33750102525     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. P.E. Howard et al Proc.SPIE Vol. 3698 131(1999)
2. Tissot JL, Infrared Physics & Technology 43 (3-5) 223-228 Jun-Oct 2002
3. J. Kim, X. Song, K. Kinoshita, M. Madou, and R. White, "Electrochemical studies of carbon films from pyrolyzed photoresist," J. Electrochem Soc, vol. 145, July 1998
4. S. Ranaganathan, R. McCreery, S. M. Majji, and M. Madou, "Photoresist-derived carbon for microelectromechanical systems and electrochemical applications," Journal of The Electrochemical Society, vol. 147, no. 1, pp. 277-282, 2000
5. S. Miserendino, S. Boland, and Y. C. Tai, "Material and electrochemical properties of pyrolyzed parylenec," in 206th Meeting of the Electrochemical Society, October 2004
6. S. Konishi, M. Liger, T. Harder, and Y.C. Tai, "Parylene-Pyrolyzed Carbon for MEMS". The 17th IEEE International MEMS Conference (MEMS'04), Maastricht, Netherlands Jan 15-29 2004, p161.
7. M. Liger, S. Konishi and Y.C. Tai, "Uncooled AllParylene Bolometer". The 17th IEEE International MEMS Conference (MEMS'04), Maastricht, Netherlands Jan 15-29 2004, p593.
8. R.A. Wood, "Monolithic Silicon Microbolometer Arrays", Semiconductors and Semimetals, Vol 47, 1997.
9. M. Liger "Uncooled Carbon Microbolometer Imager", PhD Thesis, California Institute of Technology, 2005.