Self-propagating explosive reactions in nanostructured AL/NI multilayer films as a localized heat process technique for MEMS

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 286-289

  Namazu, T ^a   Takemoto, H ^a   Fujita, H ^a   Nagai, Y ^a   Inoue, S ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BOND STRENGTH (CHEMICAL); BONDING; MAGNETRON SPUTTERING; MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; SOLDERING;

HEAT SOURCES; LOCAL HEATING; SELF-PROPAGATING EXOTHERMIC REACTIONS;

MULTILAYERS;

EID: 33750094053     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. A. J. Gavens, D. Van Heerden, A. B. Mann, M. E. Reiss and T. P. Weihs, "Effect of intermixing on self-propagating exothermic reactions in Al/Ni nanolaminate foils", J. Appl. Phys., vol. 87, no. 3, pp. 1255-1263, 2000.
2. J. Wang, E. Besnoin, O. M. Knio and T. P. Weihs, "Investigating the effect of applied pressure on reactive multilayer foil jointing", Acta Materialia, vol. 52, pp. 5265-5274, 2004.
3. J. Wang, E Besnoin, A. Duckham, S. J. Spey, M. E. Reiss, O. M. Knio and T. P. Weihs, "Jointing of stainless-steel specimens with nanostructured Al/Ni foils", J. Appl. Phys., vol. 95, no. 1, pp. 248-256, 2004.
4. T. Namazu, S. Inoue, A. Hashizume and K. Koterazawa, " Thermomechanical characteristics of sputtered Ti-Ni SMA films for derivation of constitutive equation", Proc. of The Eighth Int. Symp. on Sputtering & Plasma Process, ISSP 2005, pp. 283-286, 2005.