A prototyping and microfabrication CAD/CAM tool for the excimer laser micromachining process

International Journal of Advanced Manufacturing Technology

Volumn 30, Issue 11-12, 2006, Pages 1076-1083

  Mutapcic, Emir ^a,b   Iovenitti, Pio ^a,b   Hayes, Jason P ^a,b  

^a SWINBURNE UNIVERSITY OF TECHNOLOGY   (Australia)

^b CRC for Microtechnology   (Australia)

Author keywords

CAD CAM; Excimer laser; Micromachining; Microstructures; Process parameters; Stitching errors

Indexed keywords

PROCESS PARAMETERS; STITCHING ERRORS; THE TAGUCHI DESIGN OF EXPERIMENT METHOD (DOE);

COMPUTER AIDED MANUFACTURING; COMPUTER AIDED SOFTWARE ENGINEERING; EXCIMER LASERS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROSTRUCTURE;

COMPUTER AIDED DESIGN;

EID: 33750008713     PISSN: 02683768     EISSN: 14333015     Source Type: Journal    
DOI: 10.1007/s00170-005-0147-1     Document Type: Article

References (10)

1. Toenshoff HK, Graumann C, Hesener H, Rinke M (1998) NC-controlled production of smooth 3D surfaces in brittle materials with 193-nm excimer laser. Proc SPIE 3511:56-66
2. Krishnan A, Nassar R (1998) Rapid prototyping using excimer laser microfabrication system. In: Proceedings of the 1998 SPIE Conference on Materials and Device Characterization in Micromachining, Santa Clara, California, September 1998, vol 3512, pp 374-385
3. Braun A, Zimmer K, Bigl F (2000) Combination of contour and half-tone masks used in laser ablation. Appl Surf Sci 168:178-181
4. Taguchi G (1991) System of experimental design, vol 1. Wiley, New York
5. Mutapcic E, Iovenitti P, Hayes JP (2002) Automated generation of NC part programs for excimer laser ablation micromachining from known 3D surfaces. In: Proceedings of the 2002 SPIE Conference on Biomedical Applications of Micro- and Nano-engineering, Melbourne, Australia, December 2002, vol 4935, pp 445-453
6. Oxley A (1985) Surface fitting by triangulation. Comput J 28 (3):335-339
7. Atkin M, Hayes JP, Brack N, Poetter K., Cattrall R, Harvey EC (2002) Disposable biochip fabrication for DNA diagnostics. Proc SPIE 4937; 125-135
8. Harvey EC, Rumsby PT, Gower MC, Remnant JL (1995) Microstructuring by excimer laser. Proc SPIE 2639:266-277
9. Li J, Ananthasuresh GK (2001) A quality study on the excimer laser micromachining of electro-thermal-compliant micro devices. J Micromech Microeng 11:38-47
10. Mutapcic E, Iovenitti P, Hayes JP (2003) Overlay error effects on polycarbonate structures produced by 248 nm UV laser ablation tool. In: Proceedings of the 3rd Asia-Pacific Forum on Precision Surface Finishing and Deburring Technology, Melbourne, Australia, March 2003, pp 269-280