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Volumn 177, Issue 19-25 SPEC. ISS., 2006, Pages 1887-1891
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Structural characterization of mixed Ta-Re oxide films
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Author keywords
Raman spectroscopy; Rhenium oxide; Tantalum oxide; XRD
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Indexed keywords
CRYSTALLIZATION;
MAGNETRON SPUTTERING;
RAMAN SPECTROSCOPY;
RHENIUM COMPOUNDS;
TANTALUM COMPOUNDS;
X RAY DIFFRACTION ANALYSIS;
CRYSTALLIZED PHASE;
MAGNETRON CO-SPUTTERING;
SOLID PHASE;
STRUCTURAL EVOLUTION;
THIN FILMS;
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EID: 33749993495
PISSN: 01672738
EISSN: None
Source Type: Journal
DOI: 10.1016/j.ssi.2006.07.018 Document Type: Article |
Times cited : (3)
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References (25)
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