Local structure of Ta-Re mixed oxide thin films studied by x-ray absorption spectroscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5122, Issue , 2002, Pages 79-85

  Kuzmin, A ^a   Kalendarev, R ^a   Purans, J ^a  

^a UNIVERSITY OF LATVIA   (Latvia)

Author keywords

EXAFS; Ta Re oxide films; Ta2O5 thin film; XANES

Indexed keywords

ABSORPTION SPECTROSCOPY; MAGNETRON SPUTTERING; OXYGEN; RHENIUM; SYNTHESIS (CHEMICAL); TANTALUM COMPOUNDS; X RAY SPECTROSCOPY;

COORDINATION SHELLS; MEAN SQUARE RELATIVE DISPLACEMENT (MSRD);

THIN FILMS;

EID: 0344944184     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.515709     Document Type: Conference Paper

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