Using Software to Model Coherent Metrology Systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5174, Issue , 2003, Pages 69-82

  Shiefman, Joe ^a  

^a Shiefman Consulting   (United States)

Author keywords

Coherent systems; Interferometry; Modeling software; Optical metrology systems; Tolerancing

Indexed keywords

COHERET SYSTEMS; MODELING SOFTWARE; OPTICAL METROLOGY SYSTEMS; TOLERANCING;

COHERENT LIGHT; COMPUTER SOFTWARE; DETECTORS; INTERFEROMETERS; INTERFEROMETRY; MEASUREMENT ERRORS; PHASE SHIFT; POLYNOMIALS; RAY TRACING;

OPTICAL SYSTEMS;

EID: 2342580231     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.513111     Document Type: Conference Paper

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