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Volumn 6273 II, Issue , 2006, Pages

Materials and fabrication issues for large machined germanium immersion gratings

Author keywords

Diamond machining; Germanium; Immersion grating; Stress birefringence

Indexed keywords

DIAMOND MACHINING; IMMERSION GRATING; STRESS BIREFRINGENCE;

EID: 33749618137     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.670534     Document Type: Conference Paper
Times cited : (7)

References (17)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.