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Volumn 2006, Issue , 2006, Pages 3-8

Ring-gate MOSFET test structures for measuring surface-charge-layer sheet resistance on high-resistivity-silicon substrates

Author keywords

[No Author keywords available]

Indexed keywords

SHEET RESISTANCE; SILICON SUBSTRATES; SURFACE CHANNELS; SURFACE PASSIVATION;

EID: 33749538283     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMTS.2006.1614263     Document Type: Conference Paper
Times cited : (11)

References (10)
  • 1
    • 33749509889 scopus 로고    scopus 로고
    • "Semiconductor device and method of manufacturing such a device," Patent Number: WO2005104232
    • W. van Noort, P. Magnee, L. K. Nanver, C. Detcheverry, R. Havens, "Semiconductor device and method of manufacturing such a device," Patent Number: WO2005104232.
    • Van Noort, W.1    Magnee, P.2    Nanver, L.K.3    Detcheverry, C.4    Havens, R.5
  • 2
    • 12344322981 scopus 로고    scopus 로고
    • Effective resistivity of fully-processed SOI substrates
    • D. Lederer and J.-P. Raskin, "Effective resistivity of fully-processed SOI substrates," SSE, 49 (3), 2005, pp. 491-496.
    • (2005) SSE , vol.49 , Issue.3 , pp. 491-496
    • Lederer, D.1    Raskin, J.-P.2
  • 3
    • 1942488266 scopus 로고    scopus 로고
    • Surface-passivated high-resistivity silicon substrates for RF-IC's
    • B. Rong, J. N. Burghartz, L. K. Nanver, B. Rejaei, M. van der Zwan, "Surface-passivated high-resistivity silicon substrates for RF-IC's," IEEE-EDL, 25, 2004, pp. 176-178.
    • (2004) IEEE-EDL , vol.25 , pp. 176-178
    • Rong, B.1    Burghartz, J.N.2    Nanver, L.K.3    Rejaei, B.4    Van Der Zwan, M.5
  • 4
    • 0024717539 scopus 로고
    • Effective and field-effect mobilities in Si MOSFETs
    • J. S. Kang, D. K. Schroder and A. R. Alvarez, "Effective and field-effect mobilities in Si MOSFETs," Notes SSE, Vol. 32, No.8, 1989, pp. 679-681.
    • (1989) Notes SSE , vol.32 , Issue.8 , pp. 679-681
    • Kang, J.S.1    Schroder, D.K.2    Alvarez, A.R.3
  • 8
    • 49149141662 scopus 로고
    • Specific contact resistance using a circular transmission line model
    • G. K. Reeves, "Specific contact resistance using a circular transmission line model," SSE, Vol. 23, 1980, pp. 487-490.
    • (1980) SSE , vol.23 , pp. 487-490
    • Reeves, G.K.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.