Ferromagnetic RF integrated inductor with closed magnetic circuit structure

IEEE MTT-S International Microwave Symposium Digest

Volumn 2005, Issue , 2005, Pages 351-354

  Yamaguchi, Masahiro ^a   Bae, Seok ^a   Kim, Ki Hyeon ^a   Tan, Kenji ^b   Kusumi, Takayuki ^b   Yamakawa, Kiyoshi ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b Akita Research Institute of Advanced Technology   (Japan)

Author keywords

Electromagnetic field simulation; Integrated inductor; Magnetic film; Quality factor

Indexed keywords

ETCHING; FERROMAGNETISM; MAGNETIC CIRCUITS; MAGNETIC FILMS; MAGNETIC FLUX; MAXWELL EQUATIONS; Q FACTOR MEASUREMENT; SANDWICH STRUCTURES;

CLOSED MAGNETIC CIRCUITS; FERROMAGNETIC RF INTEGRATED INDUCTORS; MAGNETIC LAYERS; MICRO FABRICATION TECHNIQUES;

ELECTRIC INDUCTORS;

EID: 33749258234     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2005.1516599     Document Type: Conference Paper

References (4)

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3. Masahiro Yamaguchi, Yoshisato Yokoyamal, Shinji Ikeda, Takashi Kuribara, Kazuya Masul and Ken-Ichi Arai, "Equivalent Circuit Analysis of RF-Integrated Inductors with/without Ferromagnetic Material," Japanese Journal of Applied Physics, vol.42,pp.2210-2213,2003
4. K. Ikeda, K. Kobayashi, K. Ohta, R. Kondo, T. Suzuki, M. Fujimoto, "Thin-film inductor for gigahertz band with CoFeSiO-SiO/sub 2/ multilayer granular films and its application for power amplifier module," IEEE Transactions on Magnetics, vol.39,pp.3057-3061,2003