Guided wave optical MEMS pressure sensor

Proceedings of the ISA/IEEE 2005 Sensors for Industry Conference, Sicon'05

Volumn , Issue , 2005, Pages 122-125

  Pattnaik, Prasant Kumar ^a   Selvarajan, A ^a   Srinivas, T ^a  

^a INDIAN INSTITUTE OF SCIENCE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

AEROSPACE APPLICATIONS; MACH-ZEHNDER INTERFEROMETERS; MICROMACHINING; PRESSURE SENSORS; PROPULSION;

BLOOD PRESSURE MONITORING; GUIDED WAVE OPTICS; MICROMACHINED SILICON DIAPHRAGM; MICROMACHINING TECHNOLOGY;

MEMS;

EID: 33749062763     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SICON.2005.257881     Document Type: Conference Paper

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