Optical and structural properties of implanted Si wafers: The effects of implantation energy and subsequent isochronal annealing temperature

Semiconductor Science and Technology

Volumn 21, Issue 8, 2006, Pages 1059-1063

  Lioudakis, Emmanouil ^a   Christofides, Constantinos ^a   Othonos, Andreas ^a  

^a UNIVERSITY OF CYPRUS   (Cyprus)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; OPTICAL PROPERTIES; SUPERCONDUCTING TRANSITION TEMPERATURE; THERMAL EFFECTS;

ISOCHRONAL ANNEALING TEMPERATURE; OPTICAL MODELS; PSEUDODIELECTRIC FUNCTIONS;

SILICON WAFERS;

EID: 33749077524     PISSN: 02681242     EISSN: 13616641     Source Type: Journal    
DOI: 10.1088/0268-1242/21/8/013     Document Type: Article

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