Contact mechanics description of inelastic displacement response of a nano-positioning device

Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005

Volumn , Issue , 2005, Pages 421-422

  Starr, Michael J ^a   Reedy Jr , E David ^a   Corwin, Alex D ^a   Carpick, Robert W ^b   Flater, Erin E ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b University of Wisconsin Madison   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPERITY FRICTION; DISCRETE QUASI-STATIC CONTACT MECHANICS ANALYSIS; PRE-SLIDING TANGENTIAL DEFLECTION (PSTD); TANGENTIAL SLIDING SCALE;

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; FRICTION; PARAMETER ESTIMATION; POLYSILICON; SAMPLING;

NANOSTRUCTURED MATERIALS;

EID: 33749076652     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMENS.2005.3     Document Type: Conference Paper

References (4)

1. M. P. de Boer, D. L. Luck, W. R. Ashurst, A. D. Corwin, J. A. Walraven, and J. M. Redmond, "High-performance surface-micromachined inchworm actuator," J. Microelectromechanical Sys., vol. 13, no. 1, pp. 63-69, 2004.
2. A. D. Corwin and M. P. de Boer, "Effect of adhesion on dynamic and static friction in surface micromachining," Applied Physics Letters, vol. 84, pp. 2451-2453, 2004.
3. A. D. Corwin, M. D. Street, R. W. Carpick, W. R. Ashurst, and M. P. de Boer, "Pre-sliding tangential deflections can govern the friction of MEMS devices," ASME/STLE Joint Internationl Tribology Conference, Q. Q. Adams and L. Kogut, Eds., Long Beach, CA, October 24-27, 2004.
4. D. L. Luck, M. P. de Boer, W. R. Ashurst, and M. S. Baker, "Evidence for pre-sliding tangential deflections in MEMS friction," Transducers 2003, Boston, pp. 404-407, 2003.