Electrostatic micro-shutter array for infrared spectrograph

IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications

Volumn , Issue , 2005, Pages 119-120

  Takahashi, Takuya ^a   Mita, Makoto ^b   Fujita, Hiroyuki ^a   Toshiyoshi, Hiroshi ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b JAPAN AEROSPACE EXPLORATION AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ASTRONOMICAL TELESCOPES; ELECTROSTATIC MICRO SHUTTER ARRAYS; MICRO TORSION SHUTTERS; SILICON ON INSULATOR WAFERS;

ACOUSTIC ARRAYS; ASTRONOMY; ELECTRIC POTENTIAL; ELECTROSTATIC DEVICES; INFRARED SPECTROSCOPY; MICROMACHINING; SILICON WAFERS; TELESCOPES;

INFRARED SPECTROGRAPHS;

EID: 33749068884     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2005.1540107     Document Type: Conference Paper

References (3)

1. A.S. Kutyrev et al., IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS 10(3), pp.652-661, May-June 2004
2. S.Baglio et al., Sensors and Actuators A 101 (1-2), pp.185-193, 2002.
3. Michel Suster et al, Journal of Microelectromechanical systems, vol.13, No.3, June 2004