An optically powered wireless telemetry module for high-temperature MEMS sensing and communication

Journal of Microelectromechanical Systems

Volumn 13, Issue 3, 2004, Pages 536-541

  Suster, Michael ^a   Ko, Wen H ^a   Young, Darrin ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNAS; CURRENT VOLTAGE CHARACTERISTICS; HIGH TEMPERATURE APPLICATIONS; OPTICAL COMMUNICATION EQUIPMENT; PHOTODIODES; POWER CONVERTERS; RESONATORS; SEMICONDUCTING GALLIUM ARSENIDE; SILICON SENSORS; TELEMETERING; TRANSMITTERS; TUNNEL DIODE OSCILLATORS;

MICROELECTROMECHANICAL SYSTEMS PRESSURE SENSOR; OPTICAL POWER CONVERTER; REMOTE POWERING; TRANSMITTING ANTENNA; WIRELESS SENSING;

MICROELECTROMECHANICAL DEVICES;

EID: 3242722217     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.828706     Document Type: Article

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