Preparation of diffuser type micropump using screen-printed PZT-PCW thick films

Integrated Ferroelectrics

Volumn 50, Issue , 2002, Pages 61-70

  Kim, Yong Bum ^a   Kim, Hyung Joon ^b   Cheon, Chae Il ^c   Choi, Doo Jin ^a   Kim, Tae Song ^b  

^a Yonsei University   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

^c Hoseo University   (South Korea)

Author keywords

Diffuser type micropump; PZT; Screen printing; Thick film

Indexed keywords

ACTUATORS; DIFFUSERS (FLUID); ETCHING; MICROMACHINING; PIEZOELECTRIC DEVICES; THICK FILMS;

DIFFUSER TYPE MICROPUMP; OUTLET PLANAR DIFFUSERS; PUMPING CHAMBERS;

PUMPS;

EID: 33748980784     PISSN: 10584587     EISSN: 16078489     Source Type: Journal    
DOI: 10.1080/743817664     Document Type: Article

References (6)

1. Y. B. Kim, T. S. Kim, K. S. Choi, D. J. Choi and H. J. Jung, Integrated Ferroelectric, Vol. 35, p.199-208(2001)
2. Y. B. Kim, H. J. Kim, C. I. Cheon, D. J. Choi, and T. S. Kim, Integrated Ferroelectrics, Vol.41, p.107-117(2001)
3. S. P. Beeby, and N. M. White, Sensor and Actuator A, 88, p.189-197(2001)
4. A. Olsson, G. Stemme, and E. Stemme, Sensor and Actuator A, 84, p.165-175(2000)
5. O. Brand, J. M. English, S. A. Bidstrup, and M. G. Allen, Transducers '97, p.121-124(1997)
6. Q. M. Wang, Q. Zhang, B. Xu, R. Liu, and L. E. Cross, J. Appl. Phys., Vol.86, No.6, p.3352-3360(1999)