Fabrication of blazed gratings by area-coded effective medium structures

Optics Communications

Volumn 266, Issue 2, 2006, Pages 697-703

  Elfström, Henna ^a   Kuittinen, Markku ^a   Vallius, Tuomas ^a   Kleemann, Bernd H ^b   Ruoff, Johannes ^b   Arnold, Ralf ^b  

^a UNIVERSITY OF EASTERN FINLAND   (Finland)

^b CARL ZEISS SMT AG   (Germany)

Author keywords

ACES; Binary blazed grating; BLACES; Blazed area coded effective medium structures; Diffraction grating; Diffractive optics

Indexed keywords

DIFFRACTIVE OPTICS; ELECTROMAGNETIC WAVES; ELECTRON BEAM LITHOGRAPHY; MICROOPTICS; STABILITY;

AREA-CODED EFFECTIVE MEDIUM STRUCTURES (ACES); DIFFRACTIVE STRUCTURE; ELECTROMAGNETIC ANALYSIS; MICRO-OPTICS APPLICATIONS;

DIFFRACTION GRATINGS;

EID: 33748979889     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optcom.2006.05.042     Document Type: Article

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