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Volumn 39, Issue 3, 2007, Pages 449-452

Evaluation of elastic modulus of cantilever beam by TA-ESPI

Author keywords

Elastic modulus; Euler Bernoulli equation; Time average ESPI (TA ESPI)

Indexed keywords

CANTILEVER BEAMS; INDENTATION; INTERFEROMETRY; LASER APPLICATIONS; NANOTECHNOLOGY; NATURAL FREQUENCIES; RESONANCE; THIN FILMS;

EID: 33748743893     PISSN: 00303992     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlastec.2006.01.003     Document Type: Article
Times cited : (12)

References (8)
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    • Tsai, H.-C.1    Fang, W.2
  • 2
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    • Nano-indentation method for the measurement of the Poisson's ratio of MEMS thin films
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    • (2003) Sensors Actuators A , vol.108 , pp. 20-27
    • Kim, J.H.1    Yeon, S.C.2    Jeon, Y.K.3    Kim, J.G.4    Kim, Y.H.5
  • 3
    • 0026960770 scopus 로고
    • A new bulge test technique for the determination of Young's modulus and Poisson's ratio of thin films
    • Vlassak J.J., and Nix W.D. A new bulge test technique for the determination of Young's modulus and Poisson's ratio of thin films. J Mater Res 7 12 (1992) 3242-3249
    • (1992) J Mater Res , vol.7 , Issue.12 , pp. 3242-3249
    • Vlassak, J.J.1    Nix, W.D.2
  • 4
    • 0031236953 scopus 로고    scopus 로고
    • A new technique for measuring the mechanical properties of thin films
    • Sharpe Jr. W.N., Yuan B., and Edwards R.L. A new technique for measuring the mechanical properties of thin films. J Microelectromech Syst 6 3 (1997) 193-199
    • (1997) J Microelectromech Syst , vol.6 , Issue.3 , pp. 193-199
    • Sharpe Jr., W.N.1    Yuan, B.2    Edwards, R.L.3
  • 5
    • 0034140781 scopus 로고    scopus 로고
    • The determination o the elastic modulus of a microcantilever beam using atomic force microscopy
    • Comella B.T., and Poon M.R. The determination o the elastic modulus of a microcantilever beam using atomic force microscopy. J Mater Sci 35 (2000) 567-572
    • (2000) J Mater Sci , vol.35 , pp. 567-572
    • Comella, B.T.1    Poon, M.R.2
  • 6
    • 0345377798 scopus 로고    scopus 로고
    • Evaluation of Young's modulus of a vibrating beam by optical method
    • Kang X., Tay C.J., and Quan C. Evaluation of Young's modulus of a vibrating beam by optical method. Opt Eng 42 10 (2003) 3053-3058
    • (2003) Opt Eng , vol.42 , Issue.10 , pp. 3053-3058
    • Kang, X.1    Tay, C.J.2    Quan, C.3
  • 8
    • 0004175949 scopus 로고
    • Prentice-Hall Inc, Englewood Cliffs, NJ
    • Inman D.J. Engineering vibration (1994), Prentice-Hall Inc, Englewood Cliffs, NJ
    • (1994) Engineering vibration
    • Inman, D.J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.